[Zurück]

M. Ebel, R. Svagera, M.R. Ashury, H. Ebel, P.C. Zalm, C. Van der Marel:
"Experimental evidence for secondary excitation in X-ray photoelectron spectrometry";
Journal of Electron Spectroscopy and Related Phenomena, 131-132 (2003), S. 145 - 151.

Experimental evidence for secondary excitation in X-ray photoelectron spectrometry

Maria F. Ebel [Corresponding Author Contact Information] , [E-mail The Corresponding Author] , a, Robert Svageraa, Reza Ashurya, Horst Ebela, Peter C. Zalmb and Cees Van der Marelb

a Institut für Festkörperphysik, Vienna University of Technology, Wiedner Hauptstrasse 8?10, A-1040, Vienna, Austria
b Materials Analysis Department, Philips CFT Center for Industrial Technology, 5656 AA, Eindhoven, The Netherlands

Received 9 August 2002; revised 2 June 2003; accepted 10 June 2003. ; Available online 23 August 2003.


Abstract

Theoretical considerations of X-ray fluorescence analysis show that secondary excitation of characteristic radiations can contribute up to 30% to measured signals. A similar theoretical approach describes the generation of X-ray photoelectron spectra. The remarkable difference between these two X-ray analytical methods is that for X-ray photoelectron spectroscopy signals from primary and secondary excitation can be distinguished. Thus, X-ray photoelectron spectrometry offers a possibility to check the theoretical concepts of quantitative X-ray analysis. This paper deals with the theory of primary excitation of X-ray photoelectron spectra of thin Au films on Mg substrates by AlK [small alpha, Greek] from tube X-rays and of secondary excitation by MgK [small alpha, Greek] from the substrate. Experimental results confirm the theoretical approach. Furthermore, secondary excitation can be a source of ghost lines in X-ray photoelectron spectra and the theoretical treatment of this effect supports the identification of ghost lines in X-ray photoelectron spectra.

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